TechInsights对于“碳化硅JFETs原子探针层析成像”的探讨

2022-12-07  

去年,TechInsights通过一系列博客展示了电气特性的力量,对于揭示器件规格书远远不能提供的器件特性。

分析半导体掺杂的技术多种多样,例如:

· 扫描式电容显微镜(SCM ),我们经常将它包含在我们的功耗报告中,这为我们提供了大面积的相对掺杂物分析。

· 扫描式电阻测定(SRP)和二次离子质谱(SIMS)可以给出定量分析,但是尺寸有限。宽度小于1μm的掺杂浓度的绝对值很难辨别。

· 原子探针层析成像(APT)是一种非常适合小面积分析的技术,它允许在原子尺度上进行三维成像以及化学成分分析。它可以给出关于同时存在的离子的深度剖面和质谱的生动剖析。

APT功率

APT的工作原理是将场蒸发(FE)原理与飞行时间质谱(TOF-MS)相结合。离子到达检测器的顺序和它们的(x,y)坐标已知的情况下,可以应用简单的基于几何投影的算法来最终实现样本的3D重建。APT可能提供介于0.25-1.25nm的高空间分辨率,具体取决于所分析的材料。

同预测一样,APT的灵敏度只受计数统计的限制,如果探测足够大的体积,灵敏度可以达到10原子ppm。 因此,APT是一种强大的3D元素绘图技术,有可能产生接近原子级的分辨率和接近单个原子的检测效率。

TechInsights的UnitedSiC第四代SiC JFETs库中已经收集了大量分析:而这些分析内容可以在我们的订阅中的SiC电源电路布局报告、电源要点摘要和工艺流程分析里找到。 该产品还是前一篇博客的主题,也是关于讨论SiC产品电气特性测试超过规格书的参数范围的博客系列的一部分。目前,TechInsights和加拿大安大略省麦克马斯特大学加拿大电子显微镜中心(CCEM)的同事们合作,以开展更深入的分析。

CCEM拥有各种最先进的电子和离子显微镜,以及CAMECA局部电极原子探针(LEAP)4000X HR(图1)。这些仪表有助于研究各种材料的纳米特性和现象,包括金属、合金、半导体、陶瓷、矿物甚至生物材料。

特别是对于半导体器件的分析,除了元素的定量3D映射和各种层/界面的可视化之外,APT数据还可以揭示有趣的细节,例如掺杂剂对缺陷的分离、纳米尺度特征和界面的浓度分布、局部成分等。反过来,这些信息可以提供对器件性能/故障及其制造工艺的宝贵分析。


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Tnp+d6f8Dl2ZluEYxixs04Pn7HevO854to+N6C3e1te/7kiVYCjk/O7DA9i0+FwUcCuShwBMXKii4uzMEtQOY4DIteGBAtKNcVzE6hkACOG5y18wuE3lZeZ4RSW1G5QJnDUhiG5hrhm/EG+50L5eKy9QDKyXv+Q/3oGyi5Eyi+45NDOzs70bv1R4YH02wZSgvWhRQb8pQq0vgHR8WmDP2xv9P2qR1xz8L2pq2tvLCVJ49t/cVT296GYdDaRZoLm5icsDnUbQZuit9QmJqxweFRlCu9AIjGgPon6sRVGDesSGe+oVQdzss6c7On3g7IDYE0AGgIjI1rBYBKm+0Qb4nk7RzKokzu2eA+AL4b4LSNNoA7RVvQADg/R5/YOfrQ0F59NoL+5CuHucKhVY5B32DIfpfSRztRtsrHPKjwU3t5ucMIgJ/9xDgpc/JF23p96Ni2OrKWCqu2NZ50ZKTixA4E3f1sqSaUaasckdavC48r5TmCHijDGR1JuMGWa0wsBYewOjwZI5ILb0L+YiHC+fmT5ZMS5GUq+UphHu9lSYRKmkDFLM3KQvT8O//H/wlSsY957ys1ugZWAgF5cWQE6DokKfytN6SP8Kmz8c/k4kCYtA5+goVOWYbyFlvQXALE1tKmeEKycWRlglxeXACItdQFGsuUUI+LBq7T83A3nhyMq3eW0/wEKdNen3/Q8vqWfPqVvwlN5fg8aCpPXbZOK46w9KOsF8V5dh06T2yXTR9/wsUuZf3ClXHOW55/VXGJL5WnyKuwVgI8t1wp8hwPFOyZ0Gp5q3SPoix4UlSFHSCfz8IZEWV2JpfhLg/jJ6RqlusKh8ce3d+enL5jA5MLNjo5Y/MLi5Daazsb22qT+2+9aYt37+oxuoOdHTvCzLgHM+B+zMb5mBvfM8Dd7Nz8xoGfeWytr9tnnz60LRgFe4dHtrfvTxz09l1KmQwMcqbMF92Y3b2NGfTUhMrB2xTHB/v25NP3YBCs4rLGuAKFUygTlFc1g+JnK7N8VYWSZpbsC4Rx4pPbW4nxKeDdRwOD5JKHHKeoC99pcNq+0HsEjrhvgc/zw/mLfbgPgY/p8RXEyIIGBAwgaFgIpio910Y8Pg65sHzLlu+8Yst3X7WlW/egrOdtb3dHxgPdxvqKVhn4RMZZ+lQwFSyRuk15xbXPfAZgsPHRTypnKmsu+w/A+KHBw30bWpKXAmZ6tpbXm+fMBVcCzvj65GO4Ngw7Kn8+icDHEF1x08jwV1FTHg0JPk4JmXpPAdqdfQHnCt9XBXrQkPyUMcvHPuATCKyH+o3loUNa8rLjcmNB/Sd5kAF5gXK8Rxz/WEiN88lPn+LlBZzXQVWcUDIU6a5DXD85f3EtAaSHHzEVv4qoIH/oSKjKqaOT5v1NeJQL7eSrjqPu5zla5ue3CMCpuCYZoqqkBcRaUnr+nf/T/5Qp1WlsUP45GE7ewhPGQAoCfrlmRkI2gJadBohcdjBxVafVo8gb/A31LOK6yRS9VvlAU5pucgrkYsB6LX9Czpd32E3T54g0IadJNml1vhxX5dvE34SbyiBftazuz7PJeUrUwzki7zpPN7qjmmdcJrSsmb/TXQbD5UVLMD6qXPK6J8Jeh4hkesrxukX9cp5IR7n05zxV/pJWDSMP/MMHNSUBiGEhuWzNgfbchiYXbXLmHmawd23x1m19iAY6EXly1WAISc6tdXRoJ3wlMNw5Zta8V8/NgXxygCsCXJ6mkuJSPxUbXw/84sWaPYPbhQFxys1nmC1Pge/+/ft2+/ZtvfqYRhTvyXPZnRsBfbPglh3ubkF5sIhoeSqLpBxYYn6LP4YQnhfhcrjCKmkFD0kZf3GUq8pSm8FoOuLLkE5Yp7YdHZ/b8cm59lDQGGJCboKkkuYsmYaR9hxA2fJI44ev8l2+e8fuvPGWvXL/DVu8fQ8Kc8x2Nnft2aPHcA9tff2ZHezvIN0pe0mGCMF6cC8AnR7dlCHgYb7+OZb+Y5zW+KwuTucCyniZNgTKYfZ/DqPAjQBfYZAcHGUM9A1CkXPmT8VPenpSALx6ZBD+CCtfuEv0Df2xd4COYU+DMPwEb0mxfMFDpzLzPIRjONpeR/mzPpEjj1g8iB8/38njJ4Vo0j8K+DGDZF2DuIYC9bCDtHB+6JTs/dAUQ/gYwvhU3hryfOm/qlz1OBDgKF8BDzcgXxUQGARvyKsaA2xoVkaNyKN4gPD8/MaAvLVjE+pR5A3+el1zOd1kip4qX0dTmm5yCuRiwHplvkDR4BlfE+1lcFPZdb4cV+XdxN+Em8ogX7Ws7s+zyXlK1MM5Iu86T16miCt5cqvajYG4mAA+116A5cniABYvqlwW1T0R9jpEZMR53aJ+OY/72VfuTyzJn/NUj7lzms9s+/qHbH7xFZtffgU168VMdcsGhsZs8c4b+gwwN/INjkAh4Lrnc/j7UP6ba6u2u7FmO1tbdnp0oOX2AWhqvgqYb8Lj8+t8dI2P2Pmgdgll1rYXK+v25NmKbWxt2gGVfPtYSvPu8qJ965tfsbt3l2FkHGOGjPj9A6S61ApD63DbVp59akcH2yj3ufreZ5FsXCgNHGIGTZDuce6PYxNN3d8UJ1fSBXh9qHbaxQVMp8s+tGMfDKEz2z9o2cEh36VwopWC4HQl5wakVjQQ5Ff7uMdiamoW7X/Lbt191Zbv3bepmTkk67Xd7V1bef7cHtMwWFuRAqdC5f16GlvcF8Blf27io4HhM27kwHZJ5XMDAEM7VxPO+Krmtl1I+fMIAwBxXj3uNaCidyPC7/3TD9dD2SlMg0CzfdbBFb3P9pMxQD8VPfqiSJ/ic2NAfqT3tvX4cCqQFLyHo/11lN/7pAiLVywexI+f4+TxcyJkMC+9v6SGMr474roJ1MMO0uCyuE7JcQ025/lXagxwtaoA4urxCZ3GAHlLeX1/7/e+7Z8wVsOhA1gZ+ctj3qj0ZsGi6k7PIiIdSaInv4Luqcp1/nDO7C748mPdBRBKPiD3Jp6cN1BJX5OXo0KnN7mg19PlYfqb4nOX4yZxgZvwEEHL3VVo4qcLXBcmghb00l+emN14clrwezDSRhxP6OQByjQOj3ODtegzHiSfcUQmIJNLP3kKXg3+Ttdvwcr0zANHzIw9HJFK6L4ygdK63IjToYIyLk/XwEggS77H3xX3uM0u3rXJ+dtQ+pM2MbWg8MzCLRuHohocGZLi4kyctxL4LYHdnT072N6GQt+3i9MT60cc7//ynjdnvxqEkbeHMWBhdswZLhUlFSYfKzw9hULC4NRzeYbZZ4/NzUzY8ECvbW5s2OPHj20dxkYbxgJnoq4wF7Qzno/78UVDaj4qAlRH36fI2q3JRVwcww9PNT7IchkfQV78UWfRAOEjlbxvzo8f8V393GNxdkGjSIWD0huwHihPvuqXLyTixkr1PZU24rkh87h1pI2Ya6vP7MWzRzCEXsBIOtKGv6VlGAl37tnSrTs2OcmnEcaMjyrqUUAYaLpfT0MM+RYrJiwnlb9uARzDgDtCW7fsrH2AcEvGAJ8G4C0XGg98NTHfHOmPFJYzeXc+uy9n+DQIXMEXyjrxurEAxzbKVgRyxzr7kWE3DkJOxKtPEw9+3AEeB8cahp9ObPSLS34eFeJJoqOH/bor4wNlfCc6FGojeK2DL/FGDt2lNseUeXWmjriblSdHlCtPRzPbw8zFY50ias5K1MJ9fxfGgIqITkTr8Z8hd/KLXLgynDot6PQrMhjyjnd6pAl089fhcVE2wj25vPAz6NykVXkIpwdvp7sOnzfNy6KeplteLyv785Sljm5l+fy4Whaz4gCgLIO1SOKevDjNZUtlZlRxEZR81RQ4b0XJqX5JFaKltdxpwJCf9BSd/RJepjzMHzpPRxlR7uva9qqBw99/f4HZ+7gN8g16A8NQ+gM2Oj5tI2OTNjQ2Zv2YdRaDLXNGGm6UO9g91KZA3tu+ODvTdwmoDHy1geVkQaNsTEdleGaHMAQODw7tGMYAn80n/8Xlqe5zz89O622FB4eHtgXlSEODBgMV0czsrN2+d89m529pZsrbETQUNItK5QtlohxZ3sx1oxEFzQOiEfQ18hZH5Ak/36NAg4Dv24cdZEcnZ9aG0uc9+yG0KTfXQTuiHSnLzxc9jaDbB2wv7kk4s2N+inlv13ZgBPGJhK3tDb3DgIp6Fm0zy42Hc3N6ZTBvD/BUouFFSAHjGC8F0vI/jAC5M34imp+NbpNBZecMnvsJuJmQx3A0DNiO7Et3YQiUM3xX1Gzvkhb7AeTgD4Oh7lzRsy3opzHAY9l3rgcSH8K0uJzOVnM/fSIIikhIaTKUQV4HdJRSovvV0Ymma4myckfIj4zzsuRp62UMlDyltHqeedj9NC6b8ymQ0Tzr0hAI1MOEszbIA2QMME1YdJLMFMohz1BiPDr8+nVUG0NMWRr3110Tgl7nTWSgpNXhNLgUF+lyTnGIXlKbZHXDy/AG6mluIoM8cRLk/PRH+Do5OW/gujR1NKW/Ce2muHG6ULb0pvw8GOkTLZMX3jrdkYfdTxZKdf48XboOUhKRcgSv/lwx0JXpm+BGRCdPN/7u4EXPJUCeL9SjHJi5GjA4NCFl1oeZJnfxc3OYnMZmVx7Mm2n4PYGDvX3b39mBUm+hFBeYsQ5JscR79On3pez0EhsoNM5CuarANwNy/wDdLhT+BowKxt27e9dmZ2agGCF/fx/5nChPypmansbs+LZNzSxCOQ3AoNiD24EyPPXxCHWL9gnFQgSNID2QxweUDkeS3HX2icIZDRxQfqwjlDOUGzdVtk7aMHxOfclczhUrN0RyaV9fOIQM7vnkewZiNYUrJzSY+HKmFgym3Z0t29pY1euQ+b4ELvUPp/cXjE+wz4aUP5f/jbN9GALaCNjmGyB9LwA3CPrSMDeyuQJnWeI2QOmSsk7lDT4/5saAGzXB4zSky40BKHKmZVvFseCjkpc/5JPm7Uw/IuW8ncnnbc1ftTXpDOmYDsXl7r+E8xVsGVwGyfU0dYSMQKTpdGj/LkrzKjQq7gx5fHde0j2uyhJ0J2r8UMj/+M8EimVEE5LAprz7/t7f5HsGkFYdlkuIZnFEFI/R8DnKjhIDfc6X6IF6uI5cTjV9kslf0lJdxMOjBwH3RTqPdw75E53Iwzm9juALHjbkVfyBPE2OoDfFd6PlyMNN/IGgB0/uPg/ydDeR1cRT+p3ecE5W0rkTt3ox4KGIp2O6qmsGIyLS/YUM+UmnggmeUNiglKQr4MqJaUoZdbgA58AgmXwlvx9dRifqdJ6PakfuScAY1gflNDw2bQMwBvr6+PIZ7uDni4OQDsWjktAHajhwJ1l89/7B3oG1MIOnEuN9az5Lzy8bcrbHj/bw7YFc0qci52Y67kanrPbRiR3x+wSY2R+2Du356qp98ugplOiJ3bl7x6YmJ6HkD7QycHR0rDR8LG5qmh/QmbPh0QkW3nahIHcxc+YbDWWogCplAkSdvS/K+tf9eZgIWvwFLUcRLshQWGg37rug8qKh1Do+QX38SQAyMo0rX7h+tAOVKA0vbQDks/kDam+tFshAQA3xcwZZx4cHtoe22FpftS0+ZQAjiHsR9Jy/3v8wLhl8B8MZ2pC3BHhrQCsE7GBIdiOAirmc9fOYO1fSVNzuD15X+PCDFgZAaQwkWWwzykgGgR77zIyA4ih/nrfzhMNP81GtyGAZ9vbPwgLCyee48uKj+CtBBeqekjGUqjv+1vPwcNNYRXRX6o7r4jvRye8yEr2Q58dCfj0fVKWSN7xlrTvR9/d+7zt/wEHEjYFEBRjmyRadxWVaGnSxdNWEgjcNcDxR6ijldTqeTIGgCakSnrfT+NtUDqVLfiJk5PzRQJFHkU8DPCrJyPjytOECTXG5C55APS7QRCNyWviDN3dXoc6Tp8tdHU20pvas8zXTkiehzpPLdZRH/eEcLeOcl3A54XfnKNPkzulkJE+p/HOZBbINsuWxilym+50Wfl60ukJIQxak+nBUIk8Xx3CVCxxgWCQ9DncJRQ0DgB8lGhjFNej3jKm8Ocvl8vYQ4rU5TYO7P5fOXfNtbpA7v4TSH7KxiXEoJX9bIb9wqE8I8y10fCRNKwxpfEC2x4fH1trnbYIT2z86tKcrL+zBw0e2v79joyP80M+pPXry1B49fmK7u7vI40LKbnJ6Ws/k87XIp1B6m6vPbWdzTRsQpVi05Ny9HcLl9ECE8zElIL7kKmNUkRx56xPGNAb6YAzwKQvewoAxQKWppGSm876g8cI6cYMlPxDEWf4Iv/3AVQMoYfKyb+RgbHFfwQlk7u1u2zbqvLOxCqMAbQNlPzw6bOOTE8aX/sgo4psY+bSAlo89b46FMkSgrEtFXLqou/xJ4XP1hQrdDQc4HpOTws9chD0v+pmmlFvKZx95XG4IRDlBxJFtrEbTQe2ntks8lWO0aEJs9BXRY8rzP8UluAiPo4L3fLo5mWqJPTZchuyQX4Yj3uGBshwlSlrISdfmFeiUwzQlTX4Fg1aNJyKskhVxCFXZEpA+RbAfIi2MgbQykDqNlfaOYacyxlHS/Vh3cYLApwzEiXAdwZ8jp9X9gTxFTs9Bet5IuayrEDzB745hkYEyPo7hz1Gn13ma0jQh5NRlhSs6Pouv4zqem9KvC+dg3FXxgW58Qcv7kHC6u/jzcA6kSeRgd470W8uvM8w8w9UVSFzQTONxlZJAVl0eOYpqMM4Z41CSKK9I68ROWY5ol3r7MEwS9wtwOZ8bvfjkAGe3LC+VBmf0XPamoudnibmPwL9932NnZ75ngPsEaDTwqQHuiB+EAcB7+Zz59vbyg0X8Vv9l+hY/68JML/QCoYO9QyjMI9s/btnq5qY9efbC9vf2tCmQTxl89OBje/Toqe3s7eq7AG3kxQ8lLS4sQ4FOwGBo28YqjAEoRb7TQPerk+FG5G1cjDXJRThHxIU/kNOLtg4+VCf5kP8g2gjtBwWn2wR8oRLK7PC+pWPefJER3/43Pjaq1ze7QTBh0zB0pqen9MZAtTmULpU9H9Ok01sd4bgScri/a1swCjbhDmAUQPvbyPCYbqUMD4/KIFM9dX668upmCNRdYQzAMPQ0VP5Ocx62oZ8LZZpwHucGRBYP3oJH/ZRoyaECalcZAnRsNWpnAJw6FmAwJ8kfhKy/AFdidATjkk9Hp7vfI7Kk6i9HyCgIWR4lrX6dlSjH4O6I+KwADeiUUw2X8Ty6P2iVtMnbkVvOgzqy/Yp0WRTR93f/xq/8AeOig0uUDU2EX4cUEH9yKRqgz11VHtmcJhd/iSevWPAUfvwVgLdIk9VGPIkeyOUUQBKX6H/6J0tYoHWI7HEhr0NmQp3eje86RLpok5vm14SXTdtEJy1cE66K60T0GflLuZG+coIDTodL5CK12D2NszDGl1AhjQS4QD3MNMyTRzqmpfVfSPffIl5BwWVzcAveOEZcAH5GkZSTEfBTzdP5R5voCXodUR9HvX0I0uTg56yTy9UDg2OQ2a/l6UHM7vn5YG4kG0j3+3sHMKinJWAqpmN+959fH8Qsno8S8h4/3zpIBaid/pjN8/l7KneuLnDHfR8fSUOeTLu3d2AHSH8ARb8GY+DZ2ppuPcxMTdoAFAnjaSycnZ/a8cmJ7R8eo76XNj+7AIU3x1rYNl/Os7GCGfiRFJAUCZCfI7nL43J/fSwLehMtmlZ+dYA732sxBFKfnbTPrMX2Qbl5jx8ptdN/EIYV3wzIbwJMyggYs1E9ETCiWyrcS8B3/JNnCsbBJOL53QDO9tmux/xIE9qV72yg0cEnNLivYGttxVaePLKNjTXRxyZhVMwtaqWGfaY3F8KxyFTQKi9k+vJ+UvLpyLcF+vI+4nVrgHT2vdO8rTwc7aYjeZJzhe/04PF4l6FwcoyvgHT8FUeS+Ode0Qmeu3QMRpSjGsKJzh95XV4tPkHUdF2Xjgj+CMcxwGspeWtxDZcekPMH6oRqnlX+Om9cy0HHsc5CNBem0hpNY4UgcorLWPr+DowBevyWgGiCX4gkkM4jw0FjPEL4cY5Aihcx0jmvexWBAqRjAuM8fzo/uXIonDsRUQt6k+PJqSPToxwqW8HLCPc6oh5JBpHK5PUOMF0lYSmzAV7+0l2Fbjyk1TuxztctbY6cp85f9+fuZfDzpK2iLGfUvUMmvQ1ZBIuide5wSTb6Nx+oEAStDNeEVeIpy51fdKSl86KICxnNTvHpnCbgKy88HRFGHE87bf4jheGs/jqSD0477AMpzssmj9KRFzoCNoCvDFjfEOeQ2pTGWSZn+VTMfGxNGwn56Brqxd39R4cH+hwxH5djfkNQhpTPJf1zzFK5qY9L21RecctQ+SPDVuvEdvcPbe/oWMbAxuaOPV9dgdxzW5qbxwx5GoqvbZs7u7YPZXdxxkcfuaQ+CQelOcQX+ZxrzwA31p2Bl4YLiqE6sS1CCRE8dvPnR6KJRjBc0HBwH+pDOpUpjYF+GgMDxs86H8EQYN3jvj4/ETxNBT8xCmNgxMZHh/Wp5iEYW658KRP9pl8f3wYGe5F2AOmG9V0F3qqB3QUj69SO+PVHGAjixS9XalZhUH368Qe2tbWu+k9Ooy1nlvTII/cocJ+BPvCEPmSe7pLCpqGHMDtK+xng+tjvjFf5nM8VOtpX1065OVA0xTvdz+XklyOfy41rg/QO8EQRvwfFQ38iMKzTWOevg1cDW87fHVCe42Hsy6tEceXwtlu/fC6efwzwJ8Cy52M7wRQOv75cVukcyoolco9Qraun9ejgqacn6KHL05Z8RHXsd7+/VZChLA5eSsldGZ3Lr4GyKnmUqLfOXz3qZWku1y8MxclXIK/yFdUvWvi/wi8W/5I2atfzMC/vTU6Km/C8LK6/SNLwJ5D7EgMfZ7VaHUD4HL+n3MAG7UO/NqJpYEDc6QVm9/yM8Ilm79wIeAqj4BhKsK0lbaQ74yNvfMENjAIYADxylqz735DFDwRBkyC/8pripacX2vRTGfB2xLkdHbftEEYDP2y0vr5umxvbup2wBQOCTzNwFYK8fxWteC2KsaLMmbXhUxS8BTA7M2kL8wtwczY/M2XT/FLgGL8P4IqdCl9tT4uM7vzY7PQA7bsPA2fPztt8ZJNPU5hNIe2r927ZF9951d58/RVbnJ01qFY7PDyyXRhMLRgfNLpYkmefPbQ/+qf/H/sn/+l/ZD997y9hsF3Y8t037c79L9v41C00+Sh4objZbnRU3OwPGgJS7q7g8cMqCQoLKrF7EyQj42W6UpGmPPL4DLxVdZ5cUpH4C6Xt4Ti63+soaVEUOBqxBWCM9uIcS63rNKK333r06OyonbRP1LZSzDFRLFCek381KGqQjpXMr0GdtzlttNvViPa5CW8n+v4+NxAif7f6SIrO9nDZ56Tx6Bl5XBFZIE6UiHeecOEFvaCRB3kxjr/uEcr03VHNA0DxeNKIJsfyJj+mYV4vTyPnqQD6SEveDDn/VajHK3x1kgq6yb8u3ybkaZrKFe4maOJtSnudzIjvZCkJ3WU0n+DOyp8km8EizPhSXj3sfPVjd1em+/ngZZBP4QDpzbOPdD4LZRryukutgyg+1qZNg4PjmAmOYvbPd9rTcRWgD7NwPhUwpJkg9xKQxi8V8tFA7nbnqgG/Y899AUOYyfJLgfyqXbzQZqCfz66j/MiOXyjgjKoFBb93eGz73BDXOrC1jQ17/uI5jIdzW1iYs8nJMRkZu7t7MB7OMDseAW1cX8hbnJ/XM/aYsNrhHj+dvKsZr5RYqqu3V9UFPVCn52Ei9xOVeBzkz5w226Ht+riREG3EelPpj/NLfmifgQHeKkirLJz9sgdoFMHxHQsXZ204vgvgGE13rKcBOIun8UQ+5sfbLHzT4PjoiE2M+4eHuGJzmowmrqZwzOpHWZhuf3cHBtSqbW1t2snpsW5BTE3PGz9lTCNM6hdF0Yxeez3gUPa+3gHkh/7W3g83DGLWX8z807iY0+CRi1sG1XjEkafeR+HPjoR8iYeKTcMynH+siWYDgsX5DAe6b7jk0f2sY+zl6BvkitKYvlT54vmWPfzkA0hoa78L66kc2SVFCVx+d6jEHa5M4mUPF7K6yazSKStHHq5e8+7lT0lTPSLIpF3yzFEv11XlDVrf3/+bvypjwE9oVlR0VdhzDkcaHQcmHsEraoKITqcnGq3ZJfaMpsQuAEcvnNOrfKUr4x3JL3rE0ZOICUiZfAHWx0/uUnbUkc75y7hMVsaT0wuoTUs0y7ialtOvwlW8pOcnwcvIJYI30r1M2kA9TSmnU1bElWmi7J15+3nrCHk8lGxMSxeEkt+R092VTVXS6vkGynKGy+GC8vK4v+Qr05fopFXrz76ET2T1q7wYnDGonnMKT+U1MAYDYFxPAAxwMyB3tYPO992PDPNJAigHzGZ53vP2wA4/NrS/Z639XRgG+3Z81NJjbcdHB1BCm5i1b2Nme4Jc0rUBxcMZM8vTOjmDMXCirxbuI+3qxro9X3mh/QcLCzO6n95iHru7mvmPYsCeGJ9A3Ly98fqrNjs7A4XVi7xhDBzuoRowPKRw2L/5dVl1OXJaznOV6+RlmETky/cM8OkJKh8oY71sCIqHRgqNI/QCyuzp9FpgLdnzU8GcofKdAEcwAvh0RltxVHieo0Ob6ZgP0vPpjMGhARkD/BrhsN4O2acvP3K/gm7TSDGe6xaKf1550/b2diG3RxsW+f0HPs7ojxJSacftARp9NALQjnA8RpuGn84NQ6eRz1cWSr6cn34akWBK/ppj/egUBg9DPIWTYxzP23xMot8Ng9Ig8BUO1Ccp//6hEesb4mZK31DJ8u1tH9if/8n3tGLS33tqM9Mz2h/DsTcTL7A8VRQlrbhqOtKIVHj+1uR2R8iso6R5G+T5VoXTKCK9IqWWv8tw5P46muJyWsUYyDu0qRLRluJxb4kUGWn9mHgbHAW4X+yFH79e2QiL4Sao8Sl9OJfDP1raFXhkcjzUGyzxM54HeV1miUrAAVJIcvFVnijbTZF3WlM6XqREHteUx1V5dou7Ks1ViPw70zPsrh53dV4lf8gt+ct0zTLydDy6K3vJ4c3MiJzf/USZvkoPdKcXZ0M6lrzB35TOy0d6LU4FxaApMmRw1Qt/nED19g9j4OSjhSOwC8qnBvjoYOtoH8p/X58dPjo5gkLZ01f11tZWbHtnAwp5T5/s5SoBRmdrHx/BENi1k9ah9WNgH+KqARxlUkFCsFYGdg6O7aAFB7mr62u2srKie+BLXBkYozFwrCcJuIw7NTlmMzNTdmtxyV579RUYA3OQ22eH+zswBvgiHn4pkO2SK5+yjbqFm+hFqyd6oIgDOa4dBdiKiPM9A9zsx+83QKnyXjui2Y/800tp4PxWiX8lMN4KeHHOdwLACIASZx+x6yVZ6TMnWuTn3w7g+x3GuOkwfZ6Yxscp+6F9qtssVA5cceHXIfdgXO3uoc2OjiGoF4Ye3wGBvodi93Zzp02DLH/WlhHPo+qXjAg5tgfjM/6qYxz5PZ7QEY5tWqHpiB9E8JRl27FB5McPnT8Fo5aSXLZ9r1azXPkPDMOwpSEwiP6AAUvDhZsuD/aO7MOffmQ/+sH3bXXlOcSe2vT0hE1OTkoGMlL+gShPE5oUZY5qfHc5NwNlhSMyeSLhJ0gpXwbDEU3lvYqWxzXxEW4MAN5Q7GiGGO52IrigKBQI7hLIw1g/5hdaJ8Sj5OnCLMroaf3XEfICeZj+wqU//SdaUXccaYkzrrhCE69Ab6LlMhOxgIf4G85RFB+Q5Z/gXGX454XKdAWKcmdoogWuigtcF5/jJvJyBD9dfqKWMnh0f11uPUw008qBK6Bl1Qo6010PprlZGRy1MnS5MEn3uE45lTTKHj8XvagNrrV+zKBGpjCIjtnh8YmtQTG/ePHcnj97Zo8fP7RPHz6wTz/52D57+Kk9wPGDD39mDz74AOGP7fGTz+zJ8+f6jkALyv8ExoI+UnQOychCLyKCouKGRL5wiCsDxEELxsDukR0ewMEYUJ4YnKm0ljH7n8LMlS8j2k3GAJfEeZuAs7jby4s2Pz9vw5gZH+xt6Q2EvjLgs1qCbZm7q2iBgk6SDmUcUfAyLksnUEkmY0CKiUqRbc7lbN6GMS71n8oI4OyftwBoBPBdALydIr4CpeyiTCwN/cqcMVxtQQiNzBWSQczwh4cHtB+BTyrwFg9GLrQnn+44t1O0q574ODvVxs/dnV1/WRQMhV70iT4T3Q8jhvVg2cMhD1f+9LsrwnAgpHIkfrqM5unoLw0BOkJ+/PHMRIxojnSu8nxWCAaU/pxXsXzKge+v4C0tGjMwagZGxm1wkK/O5rI/V0rAo/0PXJsy1PfIHn362H7ygx/axtpzGEsncqMjAzY1PWmjo+Mq51WIsne7BgmPc2PlJrhKVqDOE3k4vHWiCdWqCIpGBNsNQLk3KU8gMwayjlcj8Uh6uKA5nT/yi+rxlOEhD9Pvx0500FXmMk0RH4cafx50/qrR4dHVNNUgMmQ4ipziqvlAbhFRupyjA8GXwUlXproSqh//VM+qnCba58VNZP2i8iLiRO0mM8pDFwNRnX4VPJo/3fgwaFeiq3zXySfIQr7rLzrP6AYiC0T+eV2ZD/0+S+WA2mMnp+e2e9CyLcyUdo8u4c7sALPFFysv7P2f/dR++KMf2c/e/5k9fPiJPfiYxsBD++STT+0n770H9xP75KOP7NFnn9nHoH3w8af22Wef2ubmChT8FpTOmRQP377H79frmXm+s4CrA+gTgvsFtnZbWhloQTnJGFh9DuV46cYAZmr83DHfL8ClYC5fc3Y3gkF/CfGLC0tacdjf27DD/W0oWd8zQETdm1zEB3Ka/OlIV2yuSw4/UBZZOAfGEv96X5phc1CFgULlf3HBxwtpCPiGNa4AmDZTJiNASzXuNKbK72A+hUJlWETvT+bJXRhKQ6MAbT3AJxdGR7SywiPfZ8D+5jsauOpCI40fi+JjoIetA9024IoBZ9o01gYHqGB568DzLFcAwghI4dSPLFARzsta82elFwo6+WgKqC7Z9QAvQ67QkA5tpNsSvTC4uALAxzCh/IdGxmxweFQrADQM/PYGy+OyBYg4Pmrb86fP7YMfv2dPn3ziRhnani+9uoShNjExYtMwNPltiasvy+uVZRkfdS7rTXSmr4Y9Pmjh97B+i2B4FCizScF0uDG61Yv0iGOb5nx9/83/2q+l2wTsxEQV2AHJmzVA2fGJEBAtThieDHUGSfR4xuG/LEd4Uhx9IY9/NVGMI2/n/WJ66M/CgMty5wTkR2+NpwKxpHokfsnw2CpI7DKwNNFy5J1xFZ8jXbTKsJP3+vRXoyl9vfzhD3oedxXyE5DI610ZaFL8dXJzeXm6HFUa/eEcCjEt/8TLo9P83OJAzXDpHPTkziFZmXOaDhVEHJHzdkfUNZfHQK9eiLO2sW0fPHxhT1e37cFnK/aTn31kzzHD39rcwGD51D759KGtY7bP5f+9/QNrYQa/v9+yF2trtg7Hzwrv7x/a+ta2PVvlDv81Ozk6tBZvJ2BGz0fc1jfWMTj32NzcjB6t48uJMEyrH2gMbO/DEDhua0UhjAEqK94m4LsGuOytVQUoARoJdENDAzY7N2vzcwvaiHewt6mVARoDnNUSPDeIaKfcNdF1u5N9ly5d/vDgvwlMy/9K2kRWFP+g1khH219qFcA3BJ6fczNgu1wF0OpS9Rp2OfhJiMf2wpGbilGpUE599pfXQCo0eVhvV9Zc/h9Emw/bxOSE9hQMQEnyTZFnfNoD5WAp+UTH4cG+7ezs6GNQNBZ424F7Rfzrh5ClcoQh4C5m/IhQu/msvywDjwF6PU6FrsQJl6TJI0evPx5IB7lcbeGGzIFhKf6h0YlkAMAN0cDkWx9pgPHMSlDyIqQ6b6xu2Ac//cA+++QjOzk51K0xfgOChitvhfX399j0zITeAklZ2VDTAEZWlWITusdX6c7nrmwL0sMPl9ELRHyqajo7EolEnoc5rUTQr6rDVXEBrQw0dbyKUAvrF7SCTE84BXl0ORWX/sBR8JT37oOOdPI7yFY6TxcukHmr9PRHn5cneYnwRzh5nN/Rc8mT0S/MRCi9fkhAiMKVQTS2l7FwJNX7AcQOUp4muQqKBKSnuDgk3o4014DsucNvoneWIafl9JdFU9qcdpOTto5In5ct/BGugjQ69jHz5G/Z36Uxy4goT8S5q6JqNFTBMpAeZakxdFQ3BpG87A1tgqiLc7PNnX17/8FDGAPr1m5f2uNnzzH7/0SPB3LXO5eU9w5bqN6ljUKpMB3vIXPQPeEM8/Icfn8+nYPqKWQwVypwvkqXXyN88vSpPj1MZX737h2bmZ7Wkm0vrmGWbLfVhjHQ0mNxrcN924DhsLLGDYRneppgbnrC7txZsLu3F5F2zEZGMOOFrGEYFfGGPirx1sG2HR/sSdFyPOqTwmkYTyou2taPLI+MgQTEVI5i1IEJ5HV/Ba6q9ZduB5yf8nYAH107F837yfOVHDk+zsmcor/oT3/i9Xx0lNJNYx7/ScJp53ysO9oXfUI/FRo3B3IPAW+xTE9O6vYB2+iofWpHfBkUTmKex3ybYQvGAPcT8M2QpHGHPdPztk6M8zzGPjEp9rQE7/knl/68fPhxj/MrHPQA4+I2AMDZPwyAHt4CGKIBwFdc47yamJIBoA2ByQCQIRIydKAstGQmn6tKOzB8P/nZA3v40UcwYrdQbz7yyg2avp+CL8ZiG/A2y9zcHIyMUU+cuiTUjvcRXSnfkRgzXDckpdqmpFcxR1zGE17omJCjMtbEaFzMabVCMVSUI0MTrUCt6jB+0QkgRpt72GlV5EIZGQwcOHlycFmPNC9WpGcl4g/nUCL6gd1fPZkc5AtXZNMAtgdPYDIxH8lLCZQFW1XFAY8c8yN38DmvK37UQXOd6n0m8XeUkamjvjnKMH1+n1EFEI0oQmKAkzWO/JGH2kr8DvWD/rx8Dm/bIi6VrQeztoKNgyGcTqrgLRzD7hyJSe7zIWR3ImobA2fJE+HmdDdHU/pucqN98zYuGy1QS4egn4s8f5GOj9lhNuhPnDCcy3Iwa3chi8dwjnoZPZwCHcgiyAflQAVxgkHv2dqmPXiyIcXuTwoM6sU3ekPe4IDuPw/wUUMaAD181Iy7xqnSOGgTfg9WtYKHp46eS4dy4COE3CB3dnZhbTg++37C1xYrHXuVf7xuOLReQOaZfiVQ4A5xl8vVCM5a+YKj+dkpe/fLb9p3v/MN+8bXviTj4pLvMmjzsTxPTJkCT2IWOAV19EIWpzpJigYt6qFrnU5k/KZuZklJ5TFFghd+ZSsCSKwT6sbVAJT3HI6POzoHlKjaELzOLhEO7tpACTTWOF3DE/NlQZXAf0n2ckBB07HNkYBptCoFBpaCfATjqMD5sqa5uSl747V79o2vfsm++e67dufWLVSh1w6P23r6gC9J4jcgPvnkE/v+975nP/zB92WgsV38lcQ0/nzVgRmyuCqUF08tRKiNBOcT2B9y9JfXEx/9k/8Ccb0wOrmJdWTSxqYWbHLutk3AjU7P2+D4pPY08NFHtaHEeNpi0uVkyecYKofg4V7LHn7yyD7+6AMYOxug822MbggQ3DjJ9tzcbtmnnz6x1RdPUJ42BeEIpxrxLxksyI5PYxBRBt5uqLuA908UrgpvKTVKgyPiCKQ25PmZCMjH4/WrZPgRzcsUYIrmEqRkTQ4/POYIeo441xKuyqoO8tWS19Ct4bpmAbounpdGlIXHcL8o1Jvx58DnLhrKUKmaupKef8nxuSp7I1x1Yf7VIvKMPuCF+nP0RdGnLw9u0ONM6PT0AgofMzAMhlyO5UNsNDAHYAjwPnM/Z5YyFqksaQbwUTXMbjGIUu/otcK4fKQbYONSjJqWP2CQHsPIwccC9ZSBojCwQtPrhUNFW4QPbQKlwGQ0O7jp7cFnj+2f/8n37Z/+8ffsz3/4U/vg08e23zq0iekZu/faa7YMhcbX+EouZfByxsxYeggF8P6mPJfLMpFOXpSCOWqlpAfl66Hijnv4NZBfvzTmcKRMnUeS/YuCt0LkViLCzBttj6PfimBlowCMS+cUSanuOZiCLzmamZ22t75wz37l21+HUfAluzW/iG7qs8MjvuqYRhyNgi374IP37U//7L+wBw8+tN39PT2mqIEWHd7Tz2NdvpdUbZp8JUcqG84HGnpqYpw0fJ9F3/CoDVH5z9+2meW7NjW/bMMTUzbAlYkBX5XoDuZQ5iLFnPwknxyd2qOHj+zBR+/b1s4qWu/MTvGnxzrJy/IgATca8hbKyuqmffjxJzAM1gqpOlJouIIQYGWa0I1eoix5E/I86rgq7l8stGeAzR5LRDmclgKobsQHzS/LcKS7n8dwQa87j0gH0XgsXdCvQyEzyiFryx2T82IrID4/yi+XX4gJDCYrVcl1dP5AabM7vAyk+5/3sacp05bpA4m7EpPnExEFXzCHS8C1IDjZIyI6wmF9Bir5vAReJl1Z9+542XLchL+JJ8rSLX09jl4P8Te5sOaDRMQRnqIfgq0mszt8QKvzMuz9Rro7/eKHr7Fd3zqwtc09nOeY7eGU3N3fteOTQxse5AzWoHBbtsMvCrbb+iY/P8WrF9rAz/0GHEApnrN/zsw5FkyNj9kSFMsoP66DjDibP8egOzMzY2+8/rrdXlos1BffPLh32LbtXb7OuGXHLb5ZcM1W1jBgn5/a4tycTYyOasl6Y3PLtjBj3TvgHoU9OzhoQSf16XbEIAySo4NNO4Dy4mxcO+GRA99gyAJqUQZeLW+nsYqrI9wkNjG9aLOLr9gMZp9Tc8sIL9jo+KwNjUwonrNh9htfyKRCE5THWsS0WCs8neeH+zyOEBud4B6l4TH5I+CyWFbm4cciTGOkhysCrA9KIn664EFa1I9H3sLhkSsGrL/HgY568fFOvR0RRhUfqeOKkDZ8xuuN0Xbs3/19bjDkY6Voc+TDzYXcoOgzdObD8rDYXmbVDGE3VqAOdQ6ixmjHnh5/0oLL/IOjEzYyMW2jkzNyw6MowxCfAIhbEl5eB2XQpTrUnDJsAI28xw+f2Ps/+amtPn+K+p2oL89g0F7C6GHRaJhGeXnO0Gi9ODq2wd5Tm5+b14bEIm8KZX7pWva8Ca9jM4KnAWobuJwltRcRQ4aLz5jAw79AfXxuAlPX+RhuTAliUmOVdPpVMeBzktD33/pbv/4HpFQ7Le8c+vGLHz8mv0tLHBHPk9qdYhMtnJNw1H81rskFf/gD3XgYlIsGiPhw5U/NOUo5pawiOhotHZ0nLiDndXb+lZAMwT3O486HoYIhyXQXUJg8UamEOi9/I1lKkY5ZohryfHLUZV+HogwN/E5L8lgWXRlwidWTpEANL5t/4LpwHSpb5qpgOHeOmK3Kj2unvOIdnXI6UeUJP+XGMdFwkD87BRjkUwQbW/v2Yn1b7wM4Ojq0NgyBkSHuwu6BYbBvq5vbUNZHUv68t3wEA6LdPvPlZD6mBhn0c/mfy8tn53yZUJ+NDo9ImfApghPw9fcN2sLCot2//4otLcymxwr1kJ1en7sDY4AKX3sGNjfsxdqGVhLmp2ZtbGTMzk4v7fy0R4+LzUzNQ3kt2ezskk1Nz+oRQ76EiMu8/YMjNjY5a1OIG5+et0nwTc1SwcM4GZ+z8UkYF1D2EzOgz92x+Vuv2cK9L9vY1KL1DY3b0NiUjcAQGAPvKHhHIWt0YgYy52xyZtHGJqAYuMucy8vafJeuYTpekfJnSjec/pwveIow4+DxcQ9/6dxw50yKL+hUWpSf5PBINsUHjfsEfCldBlByiuMxLfP7OwVgUPHtiBMTNjU1qQ2ejONTBvzGgVZ0IJ8vkjo83NMTB5zWsw8HeUtJ+bDu5Xms1R0qD4S5h4ozf73AanjchsendN9/BG54fFJ7AdwASO9kKK4Nl5UjluWjLt2QR714umI//fF79uzxZ3ZyfKjVgDP03zmd3yFAgrTKIrm9MATadri6bqf727awOItzaQ55sp4ogyxglIGNIi/OAReiP5W7KH/uHIUyvrxAtkmIC6qgVNpIq7aEF0fRI10p1kFyHSldoJRbQmZFToc3F824iC18NZ6ef/ff/F+Aj68wdStUHAXYqX7Ub0V6JogeOG9KpuEl5hE8wUuZpQBdeOnEKNo9E1o5UZQc4YIU8hzVkwr+dII0nmwqTxWNfJEHo9IqkWqVWD1NtRyOJlkloiO8ndzXhOjY5rIFIv9OnkiXnyC5n/FXy25GLiPQJKej/AjGQKAAjRvAo2+QPkO9DCVPLOfV08Tsuorm+lf56unKculQgBOTOvK03f1lmYPOY8njZ4xCHMQEP+7tH9t7Hz22P/3Bz/TCIH/kDIM8lB2/K7Czd2gHrRPIYnk54OGaA/p5DagCUOaQyefTCQyjkjzQ36NXBXMDH5XF3Py83btzz95+4037xte+bF95+1XtReA5zKfun2/s2pNnGyjDnl5i9OzFc3v29IVG21fu3raFuVkYAhf69gE/oMPbAWOjfJXuNAbqGbt1exmGwZR24ZxDgcU9YJaRr5Yd6Kdiu4BSO0VurN+AP4I2BAcj5QIz7LXnTzBrfAwBZyibvxCJS+ncHMlvI8iPMY6P4u3trtvm2mfW2t9CmyIvKUKvv+freVfODzaM2tGDZZz3BcMFrRhjgkbJ4acQ/sfeJKfLRb/Iz/v6/h4HKk7e41f6Io5h3v4BD9Jxhs/VIX758BBG2fr6hj199syePXtuuzvbOC9OpaTZDvyK4sLCgt29e9fu3ruHPliwkbEJlUWv/uU5CcXJdxUM6Pl/rgKMos19I6Dev8B2leJnOVTMhEqgArVUdu4T3iaO/LqgHIa3N7bth9//S/v4w5/Z/t4uuotveTzTXgG+hEkrFjWZ520YvWubdrK+jnNvxL7zu79qX/2137Dx+Tso72AqCIBrQl70f0ep1dbu9XLleSAirtuIqwvAdVWkiDixZnQiT6e6JH9CtAmPZVQnn9b0Eq8AL0XnNPlY9KDxkMW7MQBRPOEC7KDgUZuow7zU3neIxD9OS/dHNK1I/jkTgKME0E+BZRw3f4ikAGmUk2SJ5LwquPhS+SQuEmZI6eS5yhhIcoloXpZZ6UNslkxxRYP5LCKP/7wo6kZ/CHxpufV2cAF5vSsnSIbgyctxUxTlzvK5Vg6icmOA46+IQikn0JTH1SB/qVirMrO2vlZelIko05V1a5bD6Gr96S95cjlVmZHGeatxiV9/QMXi6IEx0LKfPXhif/L9n9jz9RcwAPhOe17N/XaSZvncM8DX6HKpn49lDQ1CSWImqA1VEHrCmT8cZ6H85v4peFgm3ufn0ury0rJ98Z0v2DtvvGH3by/Z6/fv2K0FfnKYewv4mNiQ7R62bWv3SM956/PEBwd2enSE2WSPTUzys71DsAv0wmQosTTTRfsNweCYnJqw8akZG+YjZgNQNojzjVuUT0VOhXhhB/t8xS8Vt2+U5OpB/8iEVi9OWi17+NF79vDBz+xcT1HwtcswGFDveBXzEOpGA4HXWutgxzbXn9jh3qaUi2bF+vcxRm2N7lAfezdE7+jXwXEkeQHyFueEjAHmhGOmaCKeB/+6JoH4lDY2EnsyKnyWB+0FGf5kAXkYGUoYR9DjZTz6RLHaz4xvLNzZ2bXnz1/o8dKVlRd2gr6hEdEPxzacmpqCIXbb7r/6it2GsTcyNg7Z6Cf06+DItG6zDPIlQNwPgDbka5P9toKXpQTbJZ2jqQ2JnIMoWo8FTKCYLAg/x1gS+WnsM/vx939oP/7hX9j29jpOfyh/Givoc/rP03kSkpmOxt7J5pYdPlu1y9aRTU6O2O1X5uxX/uZ37fVvfMeGx2bZokpTDEdZSYt6UZb7EnjtpbhUYIaKa1gBUhNAT2yKU+vU2UgvmBAsvRU64eMA4JlKSM5T1iWhxlNwRp5BgD94stsEpTT6GXSa+70UpOmAY0qTeHj0dCmsdHBi5g8R8YkjnVTOzTB+U3r+iqpalicYoYu3TEVSdvA8CtnJBSp+uLilkTvSCP/FMcmItGo6eFMwQwfhGpCf+ad0L5u8lsDLKJ/CddTr0YHijAESSxPvlTK6AexM4Wk9nCj0dOBz5VFUoJSbzvMGeQ2V7UAnvZSTpyeaZDSnD9Dr8uqDaxX5RU9EkBsIj6H89DIfhDloU18eHbWlzCfGRu0eZt23MfPjTIXvtZ8aH4Vy5vP+3GPAz+D6YECFPZM+HnRreVn3WV+5e9+++pWv2le+8EW7u7RgM1N8I96wHuc65C2HNr+AiEETSpYfPxod4RsK+218dNBmpkegbJDXEBQPZubjI702Cxo/3zsyhBkqaMNQ1JyljujjP/zyny9ZU8HxPQaDg6BBCfF+MG9D6HW8l3whUa/qegnlx5cZUTHsbm/a1sa6Hivj9ctZMGcFMiCoRDij1EuC/NhGm522+dpgPhnibV8c5Y8fDzfB+648r/IwKRghSxny8odjF5zoLCeUKxS4DIF01PlAY4DKvW8AShjKGI63N/iK3gF+M4HtpTCUNeO4RM+X9JAf7TiMmfwYZvuT4/42PhoMbD++xZBqxTefnqQ3TfIzyOwTtDm/GzGzBLesWyyDSMsNgOUTAHGuer3iOlBdY5xOUcERPJHK24L6Q+TifA5QPjcB7m7u2w++930YNI+tfcoPPbHcMAZkFPj3GnjuMj3ToGTW3juwgycrdrKx5Stgpzh31tZtaLzf5u/c0oZG1oNt4HnpUIDlcqSj4pO/iOLVFvGU5H71erAGb44gRp555ohiKGTVk1eo9cgAs488eGDbeMiFR3yKI/KxpcMYiKOndnTGeayC4YHS1p9Y9FOm07nPuOSUv7gVL+giSfGi584R6RsBchHHo3g9mKMpfVeZCdX45GdxUzs6hZXkAT/id+enKEm1siutX/ipW/QbuK5MJbK8Ur55B0e+N5dXvaCvwlWyG/Pz4t1I9udDCPdzKc/oqvpX4yJdczs6SE+uGDxKHmfLZV6HkrdaFkc53AAoUyhwJuPsd3xizOanZ2xpfsamoFyHMfufwHFpfs7u37kNxT5jB4f7to+BkrN/3YtmG0EEjQZ+EpePI06OjUCJT9rXvvyufeOrX7F3v/QFe+etN2x2atxOTw8x49/R9wU2dvft+eamPXmxaps7W6K3DuEOtu1wn68U3rbTkxYU7oG1D/btHAM5J7m8NaAv80HJcbzgLYBRzEaHaQwgf74tT7PcPrQhriP6OZOlhbO/eygFwCcFeMWwzNyAuIc6UWke7O/azuYqZo2nUgLx6JwMAzr4+WEh1R158yNMZ/zsLWQyruy75NhCaF945Rw5j1+7TnN/hKnUOZ7xZUL+WmM4KGj/6JErbd2WheNz9PrcNPOjAcBleSh83ocfHp32/Q4T3Pcwa+NT8zZGN0lH+hzoczYyPoV2nLKRUd6/h9OR7TqG+Cmbmpuz6dk5hWlE0cii4xv+qGCPWzQoW8i33xbv3Le55fuQOe39kdqmA5eukGlk8UgF6VxsOf7p9EpwUyHAU5erPzRI4hor2xWcILVPTm1z5YV9+uBDGII72rtCw+4Sjh9u0q2MYiUw6a/2mR0+X7W9R0+svbuL8+bC2q0jrR7JyJmdtMnZGb3xUP2VSsikLJ/KWHiIypVXoIjOAbacnqfLRYraIIAktkURnzkvBWJSHvm4RBTpEhRfZfH07iGD+2vo+ff+L9wzgI7MLggi53d6CgjsXDDkxEs2LsKgabad4iSmGDBJE1c6ckBKcSErDghHpUNWB0BWVCGD/vAUAfjgTyxEWceq/G75deRfiPOTnPLl0zPoIjgDnNdWHgcGorLKcTryN05sRyVP+VOidOgEckpJoh5CIrqEku7lAjrkgc5/OMmJeLHzpyOBylrJE2iiMWlVnJe5g+9fCDzPaGdVNZWjpOXloj/COOqcjjDPY9bX0znQ2im6Igde9kO3vOIeKMOi8Yg/nR00AujHUYIIHDDmQQlicL1o2+5OyzZ3j2z/+ML2Dk/04p+zy1N7/6NP7CEGyTEMhNy9r/JCoR4eH2uWz+8OLMAQmJ6ZtN/41V+3r3/1y5rpHx+37dnzFX3H4OnKih2fQCFjZsXbEFzSv7MwZ4vz3CSImegIBlwqd+TBt+UNUKmjiLxVMY7w7CyU2tiobkW0jo5Vp4mJCRsdx+xzcFRKkkpUxg7iuKxPEpciNta3tRO+1dpjC9g52u3g6BT+fnvzzXdsb2PVPvrZ9+3k8MBnuEjL1ycP0PX3qQyDg/BDKfNaPYUhcNjiR3720Q6ulLQjHdBtivCrJA7WRkocedP5PXOOmz72xeze+Jpd3sOHo/FRvFUPbc5l7jP0yWm7bScwXPg+/VO+0RD5c3bPWfwod+jztc8wBIbQlr4yAMVMWTSWlDfyAfgoIVdAdCLIscXpUHLtvbh0XsinQbW1CeNtZ1f332lA7e9uy/Fri29/8R377u/8LZuFMaC+QDv76YkfpOdsnTN0GlF8UoSGF1diEKG+olEyODat/MDuxfAflgY0EOHYtnryBG0/Nj6hLy7KQEzg7ay9rU17/OAD++TBA/vk0TPb2Uc/nZ+lnRaXukWgaRTalWD7nu2hfu8/sJ3PHtnFCQxQtP8IDNCF+3dtZHLc7r2zbN/+vd+yV774VRgEE7qeUgVTKR0sehDkJwpPilIFHfJlYaJMV01Y5UpIPMHKIuXp40mOlFEW6dC5m/yMDHaHB9T2AoUnWo2359/7t/7n4mvaAerhOvwiKeP8WKalik+ydL7iqAw5WPIYvOWRCH9Z6Ob4OoK/Mx7lBEl0DdJlPC9cPzryPOn3k7mzHDySGk0fcsAcVayWAyebgqKDTYN42Q7KJ/0FjwTl5eEP6QkunsJwCD4d0NiRd8Yf7eAIual/2JVqm0SvzXLVBpW2Qzjj8XQuK28vok5TGPkFSfkjPcbRrqjL7IamvAJBr/ME6rx0QQp2hhXnDVZJIz/aiLylfI+PcBxdDgkekIKAMjs3f72tHocSJ6LByEGAyiOg+6VIzMFU5aEcRFN59rJfmC3kcsf+yXm/Pfj0uT18+twO28fwP7SHnz3R7YEhbghj3lDWhxg0W0cnUJaDNjs1aYNDPfb6q6/a7/7137RpKPCDg0P76MFD+4sf/Ng+fPhQHz+i7mHZb99asF/62rv2+v37NjXOTxXP2tLyos0uTEMxYIBH4fhqYW7qG4Ju6e27tBOk39/dt7OTE32caJYflYER0QNld9k7aue9fhtC36YfuIBiHNIM9eSwbQ8+fmQ/xGC/CoXWi0JMT03Yl7/2dXv3W9+xzRer9v6P/sxaUBpUvtw3MJQMgf7BPsjCjJsKle0zMmSTcwtaaj+GUcI9B1RqR+0Wn7HUS4a4U/1MM17eCOE53qs6+3K970HgK3QHMNOWXCp8lFOKn/fYaSAgL58BQ/lDJr/8eLi/Z4eYte7v7WhvhR6xbB0g3vcu9A/6Hod+GGd8Xa/u8bOvICs/79j55fmGbkddxYMxhWm0VwRl5HckRmBwjY/B6BqFskY7cG8Ebxm0+Ynqw0P0xw7a4chu3X/V7r3xllYPNEFEdl4HNssZjIhNW/kMM/VNvu3ySP3KJxW4cZX7P+698bbdf+erNjw4Ij3rBYODAM7quYJAQ4zfFvj4vZ/Zi2c/sq9846t26947mLlPgpEfYzpXG734+GPbWPnU2jg/HzxatSfP1nU7jBtIXa2wV9AGuoZwLaHOvEWw8+GntvfwkZ0dtXTrav72bZu9tYzz44UNTl7ad//u79q3fvt3cI7exdxN5oTKmLWsIwhg8GavcuRt381fR+RVRyUNvGTJabzmiYKWeHIwLk9TkQk0xSGFJEsWPH81xgD8CisKP8rbTyr5UtpcfvjzQjfF3xwoJ5Io3UsYA0Q9L8aTRkdOb8JSDismCoKVtB3GgJNF4K/kpS5JPBKUlSfkBgr5OZ+elQYiLuOPdnCE3NQ/LI9IiZ6lU9kov4sxUKkn0NSG9b78/1djgCj9rDNmgBOLtnDrdSjNCdvZWrHNZx9BWezxLjd40D/gbzQGaAjwT3Gk0dHvH9LhOcel5fP+Sfv4sxf2KQbGAyidTx4/skePnlCKZnFjfBxscMAOoQx3oJxZronJURvsHbK7d5bsv/G3ftfeeeNVvS74wwef2n/0j/+pfe+H72mlgSsLfITti++8Zb/13V+xN1+9K2XK7+xzdYzf+z8/9hkjm4fKnp+WpZLivf/NjS3o2AtbXJy3u7fmbRyGA58IuOwdM+sbkzFwft6y4f5TGBijul99dtpjf/GjD+2f/PEPUZfn1ntxavdvz9pf+83fsHe+9qu2t7Fjn3z0Iyi3XY1l/O7BMDcQQikO0Bjg8jsUNe8J81W4t157y6aXoRD6Bu30BEqf12ofZ9IsNjeoyQuw3+iS8cYKUfFSpUoBs299uGa/UJlxVnoCxbUPpb/LmffOjm1jpru1sYbjhh3s7du+vvvQ0n17fn1QKxHpvGK/08fvOHDCELc84rzzo59PTuH4zQsphXAgD2n84iFXFvQCquFhGAcwEKAkh0bHNCufmpy2+aXb9uobX7CF5VtIh5k2XG4M8JzbR789fP+n9uFP/gSG2a4N9vNJkyF2MeoCJY183v7yV+zrv/Zb6M9pNqdwfHigFQgaRHyKZKB/2J5Cuf+H//5/YA8++XP7zi+/Y7/9e3/L7r7+LgypMTveb9na02e2iuvh7KyFuvfa6vqeffDxE32DQ09FsG40ttAGfMSSFWZd+S2Mw2crMAg+0SbC8blpm4MhcAqDZ3111cbuzds73/26feev/5q9/faXcQ1Mo55oSdbTi1siCIhXc9c4mq/tqr8OxXRkVEsDL1ly2r9gY8CfJijuefHXWyBD0MvBiSj5ePQT1h0zTTHigeyyPAVfFMx5HE20uv+qdIQ2ghRRyMvtSUfJlkCCl9kBTyZLPpAoxaM8TmEC4YInhJAQfMia1FhGrpSZjDHbJtnHI0fw6YHYAGiSTed09lt0rIe9bYlQYE1Q+RVVja+UT90dYfBVjAE6D+dtTxT5V+g4PxBMKZQ8y6qCal/eTJEHmuh1GTlPoCkPB9q2iMNRST19SGF0ycNhikjhICOe92hPbdD6xhdsYv4Va5/32AFmWhcHT6zfMPihr9WTVDCYuciLdOxHHmUMoE/op+I548Y4KRLI7+EX4Cb17H3f4Li999Of2l/82Z/Y6ovntrUNpXSwZ6cYMCcmZ2xpYRlt0Kv7sXwZDWfB1CdUBnduz9t//Xd/077+1S/pQ0J/+eP37f/x//xP7JOHD+3N1+7Y1955FbNizo4HbByKnoqmdcAPG7UwSKOX0cnt43PMaGEIjPILcpP6RgFnvbt7Ldva2lMd5mYnbBkKiJsIuRmwd2AEM2L40Tdnp0c20HtuE7ofPqp2e++Dz+zPf/SRPXm+qv0IU2P99qUvvWNvfvHbrLx9+uAn9uLJZzAA+mBozEHRTcjwYXiwl/fHz3V7YHhs3GaXbtnQxKSepOD9cq7QsB79QzAYwM/xop8vBYIyQqOo+zizpTLiLJezVCp8LnefHB/BoDjWR3KOYFzxXQvHoPMLjieg81l/HqX4+dw/0usZ+cLi4JVYnk9xulDpEVzByW+9CjwvwiOEBA87L19MREcvrj2O8XAc62lg8HbOrTv37Ou/8uuuxEcnVTZw+RyAySgHIvd29uzDH//EfvbDfyZjh23BjZ98zJC3oy6Qzxfe/bL90q/+pk1MzaIdDu0FDNCPP/rQVqGIh2CEzC8ty6h7//0P7I/+6A9tf3/HludH7GvvvmXvvP0Wzod5GBmD1H4oAYyRVKPjkzP7BIbtxw+f2vYubxOhbaSvyMc/brZEJfHf3j+wwyfP7RTG4fDIoM7HrbU1G5oZt+nXX7OhuXH74pdfs1/65W/a3VfegJwhyPM2Y73ryNu8vL6r/kATLQdjI6+uoAz+53nJZelEyMIJ9fJdV0bKVCiRGoyB1Mj4qcvydnEi/blgDiJMH42Xx4fcyJTIG5lg/kRTBQjy19NcizBc0uz2JumDh+Wg08lGWpY04gidQCE341FdE49H55EOylV35MqeRS6vRDgJ8rDAODiRnR5yGGqqY24YpSQA64VAior61NO7ARM0MvusRZlV6MmbEPIqyGQxm1Bw1/V9E1TnjL+p3kS3egVunmfwxbGU5yJ4TihYwFuKRPhwoONLf55tYZa1sm+7J5hdDY3bwiSU5fipzU9c2sggzyjOxtA6ai8uVeMfjm+WY3m13IprVvG47vqhRIfH+GKdGRudmreRqQUp/R/95Z/bH/5n/9g+/fgjOzpuaV/A8tI9u3X7vs3MzEEh85n0A8Qd2Tlm/JydUkGNjY/YF998xe7cWtKGwT/7/g/t+z96D8r90n7jV79iv/KNd7S8vsPl7v0ja7cvYAicwACAmdPfp3wuzvzWxcgoP64zbnMzUzAGBuzgqG37MAh4LkxPjdn8/AJmklTaQ9Y/PApjZlStdnZ2bHyF8sT0vD5odAGj6eFnT+2Djz6z5yurMD52ra/nDLPZZbv/xpdtYmLaHn36gYyBUSieBRgDzJe3Cfr60aLI79mzZ/qy3zLScIZMQ6pvoFdft7u4HLCVF+u2sbXutwcAfSyolzNltj/7l+crjbEL1JmvgYZih+OeA/YJl8zZR3wnAldKqPA9XXLsUznISH8Sjmue8QzySlYDME+VAl6NzWkcSpA3VgQBJo8ELjdSX0Lx84gESKRZNeTxNsLi8m37yjd+2b75nd+w5buviZs8nddKj7UwY3/4wUf28MPv6dbC1taWzczN2NzSbRvkpkX00a07t2wBCp+8P/3xD+yP//gP7cmjx7rFMAijkBsY+eTqi5UVtPVzFI0bV/vQT/xM87Atzk7am6/egWHwhs0v3rKBviGdjzw319a37cNPntjjZ6s4X09Uf+7fINBLKjONJt5uO909sNPNXWtv71prd9PO0f+z77xuIzjXKG9ubsy++c0v2de+/k29iCrAWvPa6wRp0Z4O9VdC7r8K3ivdectzoCqTZ0sg6BxLAt3KQn8ezqE4erKqyRigpzQGeDKQQlQbhnQXjsGtGpXSeqd4WIcEBnyQC5AvCqqOTAm6FT7nuSlCCeKcY+hG6ZvKkadrKp/q1UV0nUzest6Ql8pYQApAEvNTIB2Jkjl8RZFyORVEfi47gLmlQtUywV8I5k+ehoSk4lI5BdUhNxIYnzyp7TwNfzykusvyIYvzNLUtoTLV4uq0Dh6EXerVqMsgmstR0hgfLJEmR56+uPhx4BXCz/w+eLJif/qDj+2zF3v2pS9/3X7vd37HpsegPE/W7LLtG6WkNGQsQfFLWWBQwOxYm4mQpz8LPmnDo7N65n5oYhZ09gEGesym6fvskw/tj//Zf2p/+id/ZHuYUb37JSjyX/k1JB+gCMjyzWw+23Ulxxf7sGs5OPOe/sqLZ/azjzAbf/YCin3QfvVbX7Cvf+0dfXRobXULxsAhDI9LzHoh5/QcxkC/XmPsS92XGOwH9PniqclxKKV+GAN8nO0ESqnPJifGbBpGAr+qx53tA0Oj2kzGwnGDGj9Fy28XDI9OoP499uLFmj19umLrUERU6hfnJzYKJTS3fE+z0a2153YI44WPSVI2j/po02A/K2tPoYB4b3x5cVFPOBzsb8MQGLVX33hbbzl8vrJuP/j+91CvFeTPD9ywb8Oh3dURnLOm2wFU6ql7Ga++BoFl9Tg6Z+B54ueoggBkYtoaNJ6tvL3RhzBfp8uZe8zi/fl+uDTZotOHjRCnogGUIYcisl/lZKSgDOhbgk9g8BYIb0HxhU/vvPs1+8avfNdeef1t5MGNlVXkZecLo9afvrD1558hAkYtDMiZ+TmbXViyIb49EsYF5e7AmPr0owf2J3/yJ/bP//APbWt7y/ikCI0qfkFTt75oNKHgXLFAVXXe8emOqYkR++ZX3rbf/PVv2xtvvqWNlDwv+Wlirjo9erJqD2AQrK5vyegqjAG2YWo3GjuXMNBONnZt7/EzOz7YsYnbSzbx2j3t5ThrnyLdhb3++m37lW9/y958+wswyNOXDYH6qOFNUG+ZEs1jRTPI2cGfhfP2Dj+PSpeXAV6dkTVZ4q3JqPMEFEePBNGDdvxv/+1fT58w9oZVcxTtUTYMeUqQvzwxc+fpc+dGAP9CnvP5MfyBMl2nuwmq/KglDgjV6N0R8U389bRFfEYOWhlXc86Ef/cHSaBfbPpxmuADhnwZvcInbymXKP08VuMCoHos4+Sc7lBMcbIU4Zw3XEJ4XSrVnyOSeCAdQKiXt8nlcYE8vqDzULiMNx2b0CSnTgt6iUx2R1xOcwMJEvSLCLhLvZxnE7OW/b1Du7W4ZL/+679ur7/xmo2NDmDGxmfoeW1h4IZi1nPhan8ohsEhGxiZwOx/waYWXrHppVdtZvkVm5q/bUOTU3bShoKD0udufz0XjoQb62v28ScPtPj069/5rn3jG99A/vwuP2bFGI2561731XHky2gGeF33+9sF+XIX7jrnhi4qP74XYGZ6HDP5EdvdPbTtba4q8NEyKm/TrIvjCGedGHExkHMFAyWHTBoCiLajNj+iw08AYwzRxrtBOwXPSZuDPh8Z5I518PC1yWdUaj0wVkA7aev9+lqN4GoG6sp77Vya30UZ11DPtdVVfcv/kBv14Pj6XS7NMy3fsUAFOcr75jBWTlpH1jo6hAEyYEu3lu323Xs2NbOE+u7b7s6uFJRuERBsfzgfXKlsfXavPoVjNI/8889B90mBs87cXMh76zR4RkaG0ccjaL8xGSuTU5O6lcHbKHOYZS/Mwy3M6pbK4tK8LS0uaF/F8vKiHMPLSzjCLS8vuUv+W6iD3PKyLeO4fIvxOMKRtogZO986yI8b8Y2S99/6gn3hq9+ye6+9LQMslA3rLceKOkl+ntPcc8FXHs8v37KlO3dt8fZdm56bg5E4qtn76rPn9tH779njTz+1Tz75zN5/8LFtwWjUZkr87e3v2+bWtm6ZsP14DvIcpa1ycHiM46WeTHn13l3j66kHB7nq5YYr25QvrOKelUMYk1xhC0XHI++o+b439AR+REN/902O2CTq3zcyhjxJOy9etEUbkY/Njo5NyLCgNL9iJdQP+vWeDkS+TajHRVkKNKS9Sl4zwF9L8jIyyCuXwuHp+Q/+7f8l6OVSrU7qokEZ5g9p0Ryesgw7GHaa0yNaKwZKUio0op4+QHLE3Yy/pLMeVT63iMEFeqmYmsC0RKQvy1AWookWqObbDPIU+aid6MeFJwpQiEgeTtES6uUj6uW5SRk6gAuGybKsSoCochYFdDhvSVT6FFZUNDsUmNOjfDq8dHnLnJL8BuQ8ZCraGv9M8/O0UaQN5OEinwwMq97499xi1zJpF1BmR/bkxaY9fraOWfO0ffe3/rp9/Ztftt6LQ2vtrRlfk7u3s4VZ1r6121TO3F0+hhn/tA2mZ8+Hx6ZAG/XBEtcuPyS0i1nZ7saOYdSWwjk7PrQ//eP/3P5f//F/aEPg+f2//bfsTSiBR4+fYFZ8oMFR83cVFQOlDA90Hq6VQS6tY8BeX3thz1881c533oO9c3vObi/Pa0De3TtA+bgL3l+De85XIUMJ8mVHfKHRafsIhsmATaIsfH8B9xnw+/utVlvjzTRmp1OY0Q8MjagOfPUtd8DzHQN8dIzvD6CiGRwckSLY3NjQhshnL1ZsBwYK7/WfHLfsCIr9gG8/hKMiQ9GhTIZtmYoVs1c9Sqn2NxvGLJUG0MkJnz8/gWKcsS988Yv2OtrFBqbsT//oT+wvv/89vcNfvQh5bCD2I40n72vQcaDy8RjeEvF4vRAJdddkiWEc+cpg7V1A2+hRQxpdA+BBmDz6JgPojI83CpJGY4LnlytCvw3rmxghG3JjpQA/+CedRzqMdaTrpMNB5x1vvZzLgOofHLWZpbs2f+sVGxmblNGmFzKBFyZaKYd1YMVE9yMhpUuHfHjr4wBK/tmjh/bRT9+3Z08f6RbJo8cr9od/9he2sv7C7sE4mZ+d01MgT549g6RzPYo6MT5q89NTMFxHbH17D3W+tG9+9S377re/YXPg50urpmdmwD8gQ/Pk+NherGzYh588tc+eruqFW6o/4O+lgEOYI/0lzkXuD7mAUT2kmT/PKdQTBggfXeSq8a1bM/btb71r737tW3oLJnl4rUqiruESZe0ZlcdU8Xnicnqdh2FRqgWAS/6ExnQ1GhG0itzE1vcP/vZf+wMSfKafTq4O+MkhH0+SBp48bTUagaJMzTLoL6w69mQRVfI3oU7v5GPYXZOMaBjGhQuEvyOOSaI+mcg8bRMa43FCapNQkt/BUwSr8Y28gNMaCtcF4qdmT/IYlIhAGAO5LPIxLDLyqkQFL10YgQTC/Cc5Q8lfwstRpyUPUBOhSFYhLt08rWQlf6Au+zo0XVAUEQ6/ojWCPH5Qviojjpw5T2FmuDQ3aTOTmKn2H9vC9Jn1X2za0d5za7c27VJfZhu0gdFFG1+4q6/yTS/et8nZWzAIpqx3YNAHQFy3VOLHUM58Xn1ocFiz5OOjA+s5b9v2Ou/PPrHx4T4bg4LkDJmzuL29HVtZXbHnz1dsdW0VMzgu+XNWva+VgzaUJf3b21uaZfOZ/cnJMRkZXFbt1bPvUNyoTz83/5krKd4WGB0bEY3KbBIzyTko5KXFRQzs0zAo+HTAsE1MTsGouG237t61pdv3MDNeAt+izWLWOjUzC0NhFrQ5m1tcwuwTtOkZtIfBAOHLj6D8j04wm+Ts/ljfX9g7PIQCdxo3RKK4dgdGy/1X7moX/cHhga3CmFiD297d0jI3Gg/GBmbqKMvo+JQdt8/se9/7gb33/kfauX4II4Mfg2rzuwjIm23NmT8VN1/nO4yZPus6NYXZ8swUFN6kzU5zfwT6dRq0OdSdYfjnZrgCMG5TaMPJyVH0BdoSRhM3WI6MQc7wkFYs/LYGn4CA6/f3FbgBQT+NDLRzGBv0o6LsA4bDySjhEfFc7eHng/XuBcicmJ7Ti4VmFm7ps9ftVsuOD2B0Hh3qdoIekZQMrhS54SIDRfL8qEEa1z7P6/ZR254/eWI/e+/H9tknH+tDQoNDmHKjTPuQy/Pt1tKi3VpeUlmoiMcwJV+an7U3X71vX3rndXvl3l0bGx2TcXBnad4W0Jb6GBEUNzc5cpXLB5NL3RKgYcCnYFqHx7o+VX+UhsMRCPhhERFGPnw/A687GnX800kEcBWC+z54K2V6egx9OI16+oqYOIoLl4HiILzsGHITNI0zFdSybOLPaeHPaVHuStpMLoyB7/4BPc5IV03sTqFE06GG4HMXvI4IO83jyyPhfs+3pAZCZhVNtKtwFX+9LHXeaLyg81eOvF3KV0eRtuCFTJ2916fNeZryUjnk6M/DNyhbEc2LinVNQYJFFEMmgzzy5IwA6OIl2ZcOBL9McQzDwQNyXjTOTOXxsBOFioJXnIJViFaWpV5fD6dawJ+761C5aCpgmZMvyeGRL7Thu9zj1a0+o4PyH+YrZf1tbhzM+bjXyDCVwYRNTEAZDfZgJoRB7njLNp5+bDvrT5FDr43NvmpTt79qs7ffsMn5Ja0G8E123K1+sMel7HPNpvkVwhcvntkeZsuTkxP26NFntrOxbr0YTPkmwKOjXRse6LXTc353oFcKaRfGwKPHT+3Bw8/s8fNntrm5aTtbcNvbus+7trlu65tr4uMAzGVsLj3PQ2EvLt+ze6+9Y3MLyxjgobRoDEBBsG4jUGijw6MwBnqk2GZhADDt/NysnhrgO/kvLxCHenC/AN+Mx6/f8dl2vkaXTxywraiI9E0ByOLz/P2YSbdaB7axzg8i7cIAaGmWOwrjgjPdS8jlngMaSZyt3lqcs+98+5v2a9/5tt2+dRvyevWuft4C4K0DFM9vkTCPEW5uG7UNGAD/73/8T+wvf/iePV9dQzvswO1pBWRv/9B2Dg71BUi+a6GFWWnrhMrowibHR2xxfgp1HbeJUOwwFrg5bhiKcRBKSW/zg6JFI2HUZXuV500so/tJyn+eX+DjFcDLRrzi8MsLRHdUXKCCSL6SHo5L/jhSB+LYy/NufA7tOaFHPw9hBB6g71vob77diV87HIRxw/NT34XQzIzi08muEgAgk0a5m2sb9sF7P5UxwEcnuWlU34RAf/H853sOZqan4aag7MdsepLG0bTdu7tob7/+qr0CY40rRPxK5iTyn4SBxBdFcRMn30LIctBg8o9McZ8AjE/I1ouJ9lp2AoVOeMlS+QAUzRU/jAC1AYIsr45sK/zxE968ZYHq2q1bd2R4oLERmeQU4pSgK9jW3ZDHFe14hazuyBJdkf6qsjShKBPQ9w9+n68jZhuw5mVjaqkpC4c/ncPi9zQKFWHu2uUuVy1b+VlToOQv05c0HhlGGvWk+yMeIXHUkcu8DnVehmXp1tBNpuiM0jH8iipwVXmqcamuhRB3+gUfnVvhoHRpw2Z4PPle9sSIvOXHkRee8qcsERWVIG45qAH9djCVLAAic7/g9fSLD05dkeKClw4Ig8ER6R2piC6rAWqL5A90422C2qKBP6fwHvEkZq8L3Km/9IqNzsxocB2bGLS55WWbwsyXG6LGJqZteuE2Zvl3bXyKr5nFjHJhySZvvW7D47et56Jtg30XmMHdhSHwrk0svqXn4vnqNd88fmnrL17Y88ePpNT4Ot9jDIiffPpA97uprPko4ScPPrDnzz61g4MtKBs+Tjhlr9591ZZv37YXK+u2uoYZ/9GRNmLxvjyVD2dKR1ByfC/B3u6+7qlTodAI+NrX3rWvfuXL+nrha29/yb76jW/r+wWnmGHzdgAVM29VcNAehtLT7QZ0KAdyfu+AG/36oBB5z5f7AXhujfFtexMzMgIucdFzYJKSTJ3F059vpuNXBzmS70GRr65uSEHzlgBnzktLy3p64NIG9B59Lr2fnp5gdjlhX/vi2/bWm2/YMMrAGeoOlDtXPAYGelSuUcxGR/nK3uFx6Iwe+9mHH9sf/9Gf2CoMDrZD66iFNj2QUbAK4+r5ygt7+mzFPnu6Yo+fPLNPHz2xZy/W0X6Xmv1PT/iTEKo7lZfGQBL422sXuN756mF1Y4JeFiUKeOI81bhA40rS9OeCFekOeYqOvLhxzw2DxEMlKBrvkePchUE6NDxpIyMzBivKTnD+nD5/YWdoy3MYN0NQ1NOvvmpjUMpcgWA5hJRVQKVM1wLHrqODtj388FP78V9+3z766EO00zYMIL6Mid/IONP+iNs492/fXtYqD/dG8MmB8XHunxiRccRXNnOFgwYgVzn4qW3eRuOmQb1r48INPhrZLBebhCsMNDwPD49hqO2punGF+5inlmETpDbhL89x3/wpHvxr3wLcGM6fV19/A8bqlPKIesf4mTWBUB9XCz6krccRQdNvLixLp/xSHA8VOZGex4xcR55GvlxGQl6Wemx+Xl6BOAHymjiCXolL3kqF/iv8XOjW/r84ULbLL/Mpab8ofK5zIs5cOI6zZ6e8H8hnvuOlDL/4cl4Ftg+VlufoKx8H+1tQwh/Y9sZPoXxf2OLchd1/545exHLv3qjNzx7b7fu37f67v26vvPtdu/elb9hr737D3nz3V2z5i3/NRhe+xS8NIS2MgV7u4aFszvtQaY52fMKQTxNwtxXy5jcFqBC5kW5ndxOz2g0pNKoatjEfo/voo0/ts8cr9vDJmr1Y27aZ2Vmbm1+AAtuwx8/XMbOFkTA+DcU5j8F5HPmPWA8cv1e/vHzHvvTWF+yr73zR3nntdXv9/l27f++OzWCmPz42CVbwDmJAx4yeii/AAQ3F6IC6j0qOyl0rAMPWhxmkt2JyHKxRP76t7+j4UN9TODzcscN9zOgxe91cW9fKwM7OHgwWzNChNGi48DFKvZUXjcRlX54kbAPtpKdLr+UVkA1nrHrxEmbB3Kx3+84tKSueWycwVmDR+LK6lsrRppQtwxhlRxXuzE/ZvaUFGD0DtrG9CwPhhW3vbKd8CNYFB9TnFEbWKfqEr08muHuEfAyJAnq0mZew8FRAEs0rOonmX8pPtHRd0c/3/J2xMqjn2BQM1Ftv2iSXwD/4yOyHPzJ77z3rhTEzPjRiy19915a//jUYqRNK72rU5YVMH3voURBwOp+6+Oyzj21tY0X2y61bt+zVV19HU/XD6LrQSs0szrfZuUUYBpM2ODACpT6GGfiYVtFoAPAlREPDEzY+OWvTMws4zqEtBm1t88Cere7Y+vqera1xf8CR8e2ONCi5r2Rhbsbu3b1tk5M4bwEu+3P1g5BhhOqz+CRpwycD/Fe9cJ7B8RrmLZu79+/hOKl6evqy7v+/CJX9uvI38HTcJvCOz3s+p5XhKkpazHY7eRhX0priA4rhT87vBP+7gRzS63ERjrg8nKMeDlxFD1fHdXHNIB1OfVVN201WHdfxhJzcia7ZCJ33Yx11fgKhSjhQodHLsGZCDj9X5EvxHnIEH9UhLW6eu/5IVzzWRRbK8BlUd1TLmqCyoNxIy78m1OsZaThg+h+CaKcBKpfetu1uPbMHH/7APnjve/bo45/Y6pMHtvb8Q9t8/Ge28+w9LUlyifx0H4Pb6l/a+dZPYNk8t76LPbs8+syeP/jP7MmDH9g6ZmxHp33WN7ZswxO37YKzzJQfZ518kQzbY2t3zz746IH9EAM87/3fuX1X92afP3ts7eOW7pfPTE3YDgwF3o9++623MOjNY5a7ZXtQpmxXrj7p/imUIB8R5GA7qg1/03Z3ecHu8Fv3wwNSzpwp836/VjWgPPnSnY21F3q3PV/Cw28OsIkGhrhUT8XEEktFQy4Hcu5z4Ff1hjE7nNaqxuAI30zI+7o0YlA/lIX9y2f4+UZFDOMqHz+NzPcAPHryQo+WcV8Ay8PzgLdJWm0YBoeHtre7qxf+LC/O2te/8kV79f4reqSNtz5WVtZgQByi07iU3Q8DaMgmuGwNhTUNg2hj+9De+8lPYWDssmNhBPDc8vvzVBw0EG4vzdpX337N3rwHBQeDiAbp+NiwvXJn0ZYWZlGXfq0A+HniK5vu2Np8kQ6OiKdi41MfsjSYB9qAj/f18bFPPjlPq0OnHtOyyDxL4/xjhCszCIG/HwYFqGhAno984+DY1KxNzS3bOA28x0/s7CfvWw8/67uxYz0wmAYxWx/+4ts2ePeW9Q0hz1TmOsryo2/kdBba0f6xPfjggX326QO0QVtPNNyFcmYb7aIPBoeH9Pji6Cg3k3IPAYXRzuqzQRoBMASLJy3QjlwdYpvwNhFv3fC2zx4/RHXAJ1lOcQ7yuw2jMCJ8nwovea4s8CNLfGz2nCePwPYBdDLR6V9ekXEu0fG8GR8fsi984U371rd+2WZn/bPc4mNZc4BWJ3VD3YhgWStQEDxVNg8m1pvmleNljBfylvxlbpkxUC7JO9xPUgzaxUmRBJX8ccLQZUv7Bc1dTrsKGqBrfPIzmEhNcprCTa4JOf0mPDm60YmmONJyet6RTs9dFVfllSPyqPM30UogrvYXuCpd52nliDSeDlw40FvSPEWcM+kyrsF5IkqzPbRXyOC5QmOAg2dBSy6HaGUBXGyVpQN5vwgpnR9SHhyEU/5nZxe2v38KxXNkW1sHtvZizR5jsNzDDKq1t2d7+23MdA7s6cNP7eEHf24rT963rZWHtr360FrrP7Pt55/AEFi3rb0TO++dtom5t2xi/i5GPb6z/Uw75/cwA91ah9zHj+xnHz6wn/7sQ/sU8rjb/9X79/VY2YtnT+wSA/TdW0s21N+HGfULG8Vgev/VV+2V+6/b9NyCZo4tKEbeGmD7aae8JpN+j5sfHeJjV7wfTkV2wE/dQkFTaS7fe13P/u9tb9oa8uKsvdXipkMu/5sNIb3PzPx9CWwjf7SOTwYMaUDnB3j8E8XDSANlQWWH9tQnfSGERg/D5NcmMMjbxix8ZXXT+PpkvkSJeyC4usDpHxX+ERQDb5XwYzp3bi3Y177yBRlEfFRxc2NdxgD3GhAsI99DwBcezczO28jolD1/sWJ//v0far8An3po0/Ck8uAsEv3N5emZyTH72hdfs29+5S1tCuSHhnhfe1mPAs5rqZuPRxI8PXji8sAXGFHZ84uEfDKEqy+jozPg55MU3DjIT0tPQDGOwUDyfRJUivzSIe8PJYlycS7zT+j162EIM+7J2SWbXrpnU+OzNnzUNnuGWfvOno1NL5idQAkeH1v/vXs2+pUv29Ar96yXKzy8/kJWgvLwCgjhj3yfP1mzTz/6yDbWX9jZeVvl03cn9mFI4XyiITA+Pi6Fj8SeFgc9vqoVAfQzaHxygq9H5vspNO7DkYd9zlvNNDK52RUnkvG11txb4I8BXho/lAVW292HoXrMR0d5rkEGjvxj26f/EjiR+OruoaF+e+21O/ZL3/qa3X3lvs77KCfh6TPUgp8PSWqSxdxijCnE1/LpGIMS6vRufAHGKvcr+GQMsA1kiap4jlKpo3FxjMziJFFUEa7yu3PIF/mLr4zLUcr1+PwY/m7oxpPTrpNBXCXnKllNaQJXxQVC/nVy8vjr0gS9fpIEvSmth9nXHs5R5a2fC4jjvw4ZDSjyTzw6Fgh/HEPJ0y9mZUWZwUN5ITOMAB7LNM2I
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